Semiconductor

Gas Analyzers for the Semiconductor Industry

Semiconductor Manufacturing Applications:

Annealing of Wafers

  • Silicon wafers are heat treated in an inert atmosphere in a high temperature furnace

Gases of Concern:  Argon, Helium, H2, N2, Mixtures

Range of Measurement:  Trace or Percent

Monitoring of Oxygen in Confined Spaces

  • Monitor quality of breathing air to ensure that the cryogenic gases used in the labs do not deplete the breathing air oxygen

Gases of Concern:  N2

Range of Measurement:  Percent

Annealing of Wafers

  • Silicon wafers are heat treated in an inert atmosphere in a high temperature furnace

Gases of Concern:  Argon, Helium, H2, N2, Mixtures

Range of Measurement:  Trace or Percent

Furnace for Production of Ceramic Components (sintering process)

  • Ceramic components are made from sintered materials which  involve heat treating or bonding of powders to form a coherent shape

Gases of Concern:  N2

Range of Measurement:  Trace or Percent

Questions? We’re here to help.

Alpha Omega Instruments
4140 World Houston Pkwy, Suite 180
Houston, TX 77032 USA